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During the course of device fabrication, a wafer may be subjected to one or more process steps in which a wafer is moved among multiple process chambers for each processing step. The process steps may be performed under different conditions or chambers, and each step may include different or repeated process recipes. For example, a particular wafer may be subjected to one or more steps in which the wafer is exposed to a plasma, may undergo a Rapid Thermal Processing (RTP) step, may be annealed using Rapid Thermal Anneal (RTA) conditions, or may be subjected to any number of other different or repeated processes. In such a process, the wafer may be repeatedly moved to different process chambers, subjected to different sets of process conditions, and/or transferred between processing modules.
In some cases, the transfer of a wafer from one process chamber or module to another may involve contacting the wafer with process modules or electrodes disposed on the wafer. In the case of contacting a wafer with the electrodes disposed on the wafer, the wafer may be placed on a movable chuck that may be lowered into a position that allows the wafer to be touched. After being touched, the chuck may be raised, and the next process step may be performed. In some cases, the contact between the wafer and the electrodes may be made with a polymeric material (e.g., an elastomer or a 0b46394aab
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